Cabot Microelectronics
Aurora, Illinois
Hill Mechanical is the design build HVAC subcontractor on the new 134,000 SF research facility for Cabot Microelectronics. Cabot Microelectronics develops and distributes slurries that microchip producers use in their manufacturing process. This facility is being constructed as an addition to their existing office and warehouse.The building includes general office space, research and development labs, applications labs, a pilot plant and a Class I clean room. In addition to meeting the HVAC needs of the new facility, Hill Mechanical Corporation also designed and installed process lab piping including compressed clean-dry air, vacuum, Nitrogen, deionized water and process chilled water. The research and development lab was fitted with a variable volume Phoenix exhaust system used to maintain pressure differentials between spaces.
Architect:
Valerio Dewalt and Train Inc.
General Contractor:
Graycor Construction Complete: 2001 |
